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Lithographically fabricated SU8 composite structures for wettability control

机译:光刻制造的SU8复合结构,用于控制润湿性

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摘要

SU8 is a negative resist which is widely used for the fabrication of micron scale lateral features over a wide range of heights using photolithographic methods. This has been extensively used as a method to produce surface structures to which hydrophobicity can be added and model super-water repellent surfaces. However, such an approach requires at least two-steps and does not embed the desired properties as part of the structure itself or create multiple levels of topographical structure. In other applications, a variety of inclusions have previously been studied to tailor the properties of SU8. In this work we report an approach to, and results from, incorporating inclusions, in our case glass beads, of different wettabilities into the SU8 structures produced by photolithography. In particular, we focus on ridge structures expected to be of use in flow systems as drag reducing surfaces. We used scanning electron microscopy and profilometry to investigate how the inclusion of either hydrophobic or hydrophilic glass beads (sieve size of 20–30 μm) affects the definition of the structures formed and contact angle goniometry to define what effect such inclusions has on the wettability of the SU8 composite structure. It was found that the inclusion of hydrophobic glass beads in the SU8 resist resulted in poorly defined structures compared to both SU8 on its own and SU8 to which hydrophobic glass beads were added. In contrast, inclusion of hydrophilic glass beads resulted in a well-defined ridge structure with the majority of the beads located in the ‘valleys’. Both EDX analysis and contact angle data indicated that the surface chemistry of the beads themselves (both the hydrophobic and hydrophilic beads) was masked by the SU8. Counter-intuitively, the inclusion of hydrophobic beads in the SU8 composite resin resulted in ridges with increased wettability, compared to SU8 ridges, as opposed to the inclusions of hydrophilic beads that resulted in surfaces with increased effective hydrophobicity.
机译:SU8是一种负性抗蚀剂,已广泛用于使用光刻方法在很宽的高度范围内制造微米级侧面特征。这已被广泛用作生产可添加疏水性的表面结构并为超疏水表面建模的方法。但是,这种方法至少需要两步,并且不会将所需的属性作为结构本身的一部分嵌入,也不会创建多层次的地形结构。在其他应用中,先前已经研究了各种夹杂物以调整SU8的特性。在这项工作中,我们报告了将不同润湿性的夹杂物(在我们的情况下为玻璃珠)并入通过光刻法制得的SU8结构中的方法和结果。特别地,我们集中于预期在流动系统中用作减阻表面的脊结构。我们使用扫描电子显微镜和轮廓仪来研究疏水性或亲水性玻璃珠(筛尺寸为20–30μm)如何影响所形成的结构的定义以及接触角测角法,从而确定此类夹杂物对湿润性的影响。 SU8复合结构。已经发现,与单独的SU8和向其添加疏水性玻璃珠的SU8相比,在SU8抗蚀剂中包含疏水性玻璃珠导致结构定义不清。相比之下,包含亲水性玻璃珠则形成了清晰的脊结构,其中大部分珠位于“谷”中。 EDX分析和接触角数据均表明,珠粒本身的表面化学性质(疏水性和亲水性珠粒均被SU8掩盖了)。与直觉相反,与SU8脊相比,SU8复合树脂中包含疏水珠会导致脊的润湿性增加,而亲水珠的夹杂会导致表面的有效疏水性增加。

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